专访伊智公司副总裁暨CTO（首席技术官）Tim Boyle，以及中国区首席代表姜晓东
伊智公司(Electroglas)在晶圆探针台领域已经有超过40的年历史了。早在半导体行业发展初期，伊智就开始着手从事该行业，并始终坚持用独特的技术制造高可靠性的晶圆探针台。正因为如此，几乎全世界所有的半导体主要生产商都依靠伊智公司的晶圆探针技术来帮助他们全面提升晶圆和器件测试过程的效率。伊智公司销售了超过15,000台晶圆探针台，是行业内最大设备供应商之一。
Electroglas has been in wafer prober business for over 40 years. They started in the very early days of the semiconductor industry and have consistently made highly reliable equipment with unique technology for wafer probing. Because of this, nearly every major semiconductor manufacturer in the world relies on Electroglas‘ wafer probing technologies to help them maximize the overall efficiency of their wafer and device testing processes. Electroglas installed base is one of the largest in the industry, having sold over 15,000 wafer probers.
1963年，Electroglas生产出了全球第一台商用的晶圆探针台；1982年，全球第一台全自动探针台EG2001再度出自于伊智公司之手。由于该设备使用了其自有的Sawyer motor专利技术，提供了永不磨损的气垫承载台，奠定了EG2001今天在市场中的地位，成为中国最著名的探针台之一且受到广泛应用。致力成为一家综合的半导体测试解决方案供应商，是Electroglas重要的战略目标之一，因此伊智也为器件封装提供后道测试机械手和测试台管理软件。
They were first in the market with a commercial wafer prober in 1963, and the first with the fully-automated prober, the 2001, in 1982. The EG2001 is one of the most famous and widely used probers in China today because it uses their patented Sawyer motor with an air-bearing stage that never wears out. They now also offer a final test handler for packaged devices and test floor management software as part of their strategy to be a comprehensive semiconductor test solutions provider.
最近伊智正推广全新的300mm晶圆探针台EG6000，提供了全世界最快、最准确、最可靠的300mm生产用探针技术解决方案。除了300mm探针台以外，伊智还推出了新型延伸性能的200mm探针台4090μ+。这些系统都满足了测试尖端精密器件、铜内联半导体、低K值绝缘体工艺和其它一些先进的应用需求。此外，伊智还研发了基于探针台技术的机械手系统Sidewinder，实现了strip格式的器件测试，使其客户能在strip封装测试中高度利用并行测试能力和独特的材料传送技术。
They have recently introduced a new 300mm wafer prober, the EG6000, that provides the world‘s fastest, most accurate and most reliable 300mm production probing solution. Joining their 300mm prober is a new extended performance system for 200mm wafer probing, the 4090μ+. Both of these systems address the demands of testing fine pitch devices, semiconductors with copper interconnects, low-k dielectric processes, and other advanced applications. Additionally, they have developed a prober-based system, called Sidewinder, for testing devices in strip format that allows their customers to take advantage of the higher parallel test capability and uniform material handling provided with testing packaged devices in strip format.
技术见真章 精益求精
Technology is Hero, Better and Better
为了让产品能更快速及时上市，“可靠度分析” 已不再仅是后段工艺的责任。若能及早将不良的芯片在晶圆测试阶段即予以剔除，便能减少后段加工工序中不必要的浪费。早期发现瑕疵问题点，有时正是交易赢亏的决定性因素。因此，传统使用封装形式的测试已不敷需求，渐渐往上游回溯至晶圆层级，被晶圆形式所取代。
For making the products be time-to-market, nalysis of Reliability does not only rely on the backend process. If we can eliminate the bad chips in advance of the testing stage, then the non-meaningful waste can also be decreased in the later process. Find the faults early, sometimes it is the fatal factor to gain or lost. Therefore, the traditional testing of packaging format has been not enough, and it moves up to the wafer level.
在晶圆形式可靠度分析中，承载晶圆的探针台是不可或缺的。在这块呈现 “寡占”局面的市场中，整体份额多由3家龙头厂商所共享：在亚洲拥有生产基地的美商伊智公司，以及来自日本的东京精密(Toyko Electron)和东电电子(Toyko Seimitsu, 也就是Accretech)。值得一提的是，伊智公司是三者之中，惟一一家始终致力于晶圆探针技术研究的公司，并保持在该领域处于技术领先地位。
The prober is necessary role in wafer-level analysis of reliability. In this oligopoly market, there are three big players to share: Electroglas, TEL (Toyko Electron) and TSK (Toyko Seimitsu, also known as Accretech). Electroglas is a U.S. company with manufacturing operations based in Asia. TEL and TSK are Japanese companies. Of the three, Electroglas continues to be the only company focused on wafer probing technology and remains the technology leader in this segment.
伊智公司的首席技术官暨副总裁Tim Boyle坚定地宣称:”为了在市场上维持优异的竞争力，Electroglas一直致力于提高客户服务水平和对客户需求的响应能力。”日前刚荣获测试和材料传送设备供应商前十位殊荣的伊智公司表示，未来将继续在为客户服务方面全力着墨，将其视作客户工作的重点，并将继续寻找提高客户产量和效率的方法，以提升设备的全面价值。多年来伊智公司以其设备生产中高度可靠的设计和性能良好著称，在享誉国际的同时亦不忘精益求精，推出许多革新的晶圆探针技术，包括：无摩擦、高速度的定位技术。
Tim Boyle, Chief Technology Officer and Vice President, stated confidently, in order to keeping the excellent competence, Electroglas has worked hard to improve their customer service and their responsiveness to customers needs. This company who has being named to the Top10 Suppliers List for Test and Material Handling Equipment said, they will continue to concentrate on these areas and see them as their key to remaining a dependable partner to their customers. They will also continue to focus on improving the overall value of the equipment by seeking ways to increase their capabilities and efficiency. Electroglas is well-known for its highly reliable design and performance, with equipment remaining in production for many, many years. As well, over the years they have introduced many innovations for wafer probing, including their frictionless, high-speed positioning technology.
效率和精确 恒常目标
Efficiency & Accuracy, Forever Goal
近期，伊智公司又推出了MicroTouch微接触技术，它减少了测试易碎器件或当铝垫pad置于活动电路区域上时造成的接触损坏。另一个最新发明是针对12英寸探针台EG6000而生的精密的直接驱动技术，该技术让这一设备达到了同系列产品现今可达到的最高精确性。EG6000同时也使用了伊智拥有的移动控制技术，从实质上消除了生产环境中外部振荡产生的负面影响。
Most recently, they have introduced their MicroTouch feature that reduces touchdown damage that can occur when testing fragile devices or when pads are located over active circuit geometry. Another recent innovation is their precision direct-drive technology for their 12-inch prober, the EG6000, which allows this system to achieve the highest accuracy available today. The EG6000 also utilizes their proprietary motion control capability that virtually eliminates negative effects on test from external vibrations encountered in the production environment.
回顾半导体产业的发展，晶圆从6英寸进化到8英寸，一直到现在的12英寸晶圆，伊智的技术发展和自动化水平也能亦步步趋，满足更加精确、高速的系统。这比那些早期系统更容易使用，如今的生产环境中只需非常少量的操作或者支持即可。高产量和使用简便相结合的先进性能是今天和未来满足客户需求的重要因素。
Having a look on the development of semiconductor industry, the progress has been moving from 6-inch wafers to 8-inch, and now 12-inch wafers, their stage technology and the level of automation provided has evolved to provide a more accurate, higher speed system that is actually easier to use than those earlier systems and now requires very little operator assistance or intervention in the manufacturing environment. This combination of advanced performance for high-volume production and ease-of-use are key factors in delivering the solutions their customers need today and in the future.
伊智总是着眼于寻找提高系统效率和精确性的方法。其中伊智公司最近最重要的一个进步就是：实现了对于晶圆探针台Z方向的更大程度的控制，这直接影响到探针接触晶圆的精确性和冲击力，为客户提供了高效率的测试；即使是最新型的精细器件。此外，其新颖的防振技术避免了测试质量的降低或影响产出，且增加了探针台产量。
Electroglas is always looking at ways to improve the efficiency and accuracy of their systems. One of the most important advancements recently for Electroglas has been in gaining greater control over the Z direction of the wafer prober, which affects the accuracy and impact force of touchdowns on wafers and enables their customers to effectively test even the most recent types of delicate devices. In addition, their new anti-vibration technology prevents degradation of test quality that can affect yield, while simultaneously increasing prober throughput.
挟厚实根基 问鼎中原
With the Strong Foundation, Target the China Market
在过去的两年中，伊智主要为200mm和300mm晶圆探针台和封装测试处理引入了新的技术。正如前面提到的，这些技术包括：第2代的300mm探针台EG6000、延展性能的200mm探针台4090μ+，以及基于探针台技术的strip测试机械手Sidewinder。所有这些产品都从根本上提供了全新的技术，为客户解决了测试中诸多最棘手的问题，更为将来打下了坚固的基础。
In the last two years, Electroglas has made major new technology introductions for 200mm and 300mm wafer probing and final test handling. As mentioned earlier, these introductions include their second-generation 300mm prober, the EG6000, their extended 200mm prober, the 4090μ+, and their prober-based strip test handler, Sidewinder. All of these products provide fundamentally new technology that solves their customers toughest test challenges today and offers a solid foundation for the future.
中国区首席代表姜晓东则针对商业略战做了说明，亚洲是全球半导体的发展最快的地区，也是伊智公司目前和未来发展的重中之重。早在2002年，伊智就将全球生产基地从美国移至新加坡，其中最重要的原因就是使产品更加靠近用户、更加靠近半导体生产制造中心，期望在未来两年内使该地区的销售额大幅增加。为此，伊智正在该区域内扩充销售和技术服务团队，谋求跨越式发展。
Stone Jiang, Chief Representative of Electroglas China, made some notes for the business strategies: Asia is the fastest growing segment of the semiconductor market in the world, and therefore is critical for Electroglas business. They have moved their product fabrication center from the USA to Singapore in 2002. One of the main reasons for the move is to be closer to their semiconductor customers and the highest concentration of semiconductor manufacturing. They are anticipating a significant increase in their business in Asia over the next two years, and they are expanding their sales and service capability in the region.
姜晓东深谋远虑地阐述，中国是亚洲半导体市场中发展最快的国家，国内对半导体产品和设备的需求很大。中国(中国大陆和台湾地区)的半导体产业将来总和一定会领先于世界半导体业。从技术层面来讲，目前，台湾地区半导体产业正在全面转向12英寸技术，而中国大陆仍以8英寸为主，并对二手翻新设备有着庞大的需求。伊智的策略是为客户提供全方位的产品系列，以满足不同层次的需求。“就中国大陆而言，我们推出6英寸到8英寸的翻新设备满足南方和长江三角州一带低端消费类IC厂商的需求；对于北方和上海地区的12英寸用户，我们推出了代表目前世界最先进水平的12英寸EG6000设备；对于8英寸探针台的需求，我们有成熟的EG4090系列产品。”
Jiang commented by a foresight eye. He explained that China is the fastest growing portion of semiconductor business in Asia. The domestic demand for semiconductor products and equipments has been very strong. The total semiconductor revenue in mainland China and Taiwan have the potential to be in the leading position in the world in the future. Technically, the semiconductor technology in Taiwan is moving to 12 inch, while in China the technology is mainly 8 inch now and the demand for refurbished equipment is still huge. Their strategy is to provide different products for different customers with different demands. or example, in mainland China, we provide 6 inch to 8 inch refurbished probers for low-end consumable IC manufacturers in south and in Yangtze River Delta Area; in north and Shanghai area, we provide their latest 12 inch products to the customers. For those customers requesting 8 inch products, we have our mature product line, the Electroglas 4090 series.
结语：软硬件服务全面到位
Conclusion: Software Hardware Included Total Solution
除了传统的探针台产品以外，伊智新推出了基于探针台技术的机械手产品Sidewinder,并在2005年5月为中国大陆客户引进了第一套该机械手设备。根据该公司内部的预测，其在中国的业务将会持续快速增长,而Electroglas也已做好了满足庞大市场需求的准备。
In addition to prober products, they have also developed a strip test handler, the Sidewinder, based on prober technology. They recently sold a Sidewinder handler to the first Chinese customer in May 2005. They anticipate their business in China will continue to increase significantly and have plans in place to meet the huge market demand.
著名的美国半导体研究分析公司—VLSI研究中心，曾预测晶圆行业的持续有力增长，特别是strip测试行业，更将呈现快速成长的趋势。Tim Boyle认为，伊智300mm的最新技术应该会为其持续争得市场份额，而其自有strip测试封装中的专利技术更会让伊智成功地在这一崛起的市场内争得一席之地。
The well-respected U.S. semiconductor research and analysis company, VLSI Research, has projected continued strong growth in probers and rapid growth in strip test. With their new technology in 300mm they should continue to gain market share and their patented technology for strip test handling should allow them to successfully participate in this emerging market. U.S. law pursuant to the safe harbor provisions of the Private Securities Litigation Reform Act of 1995 requires me to say here that all projections of future performance are not a guarantee of actual results and that actual results may differ materially from this forward-looking statement.
Tim Boyle继续说道，在战略伙伴的经营上，伊智公司素来都与主要测试机和晶圆供应商保持长期而良好的合作关系，近来也采取措施加强这种关系的维系。此外，伊智也与半导体设备产业的其它公司建立了合作关系，保证能够及时获悉可能影响探针和测试技术的生产过程的改变。最后两位受访者代表一致重申，除了完全确信伊智的产品存在着一定的技术先进性以外，对于客户的服务和对其需求的响应，加上亚洲优秀的生产运作，将可确保将那些技术价值可有效地为客户带来更低成本、高利润的测试。
Boyle continued to express, about the maintenance of strategic partnership, Electroglas has maintained a long-term and good relationship with their partners. Recently they also took some steps to strengthen its long-time relationships with major tester and probe card suppliers. They have also entered into relationships with other companies in the semiconductor equipment sector to gain insight into future fabrication process changes that may affect probing and test in the coming years. At last, the two interviewees highlight the key points in accordance: While they do believe all their products have technology advantages, they feel it is their customer service and responsiveness combined with the excellence of their Asian manufacturing operations that ensure the value of that technology translates into lower cost of test and higher profits for their customers.
